System and method for testing an electrostatic chuck

ABSTRACT

The present invention provides a reliable, non-invasive, electrical test method for predicting satisfactory performance of electrostatic chucks (ESCs). In accordance with an aspect of the present invention, a parameter, e.g., impedance, of an ESC is measured over a frequency band to generate a parameter functions. This parameter function may be used to establish predetermined acceptable limits of the parameter within the frequency band.

BACKGROUND

Electrostatic Chucks (ESCs) are essential to precision semiconductorwafer manufacturing process. Existing chucks may be divided into twomajor categories, each category having its particular strengths andweaknesses.

The dielectric in a Polyimidc ESC (PESC) is a strong insulator,consequently, most of the applied voltage drop is across the dielectricand creates a Coulombic chucking force. Unfortunately, the PESC workingsurface is super-sensitive to scratching. Further, the PESC issusceptible particle embedding, which can cause arcing between thebackside of the wafer and the copper electrode on the PESC. Stillfurther, the PESC cannot be used at high temperatures because hightemperature operation can cause blisters of water moisture through thepolyimide layer.

The partially conducting Ceramic ESCs (CESC) require a constant currentto achieve adequate chucking force, thus CESC leakage current isgreater, requiring a larger power supply than a PESC. Thiscurrent-dependent chucking force, known as the Johnsen-Rahbek Effect, issmall compared to the Coulombic force in the PESC.

CESCs with anodized aluminum trioxide (Al₂O₃), currently available onlyas monopolar devices, are extremely sensitive to moisture. Further,anodized aluminum has been used as an ESC insulating layer in somebipolar ESCs. However, arcing and anodization defects often cause earlyfailure of this type of ESC.

Doped alumina has been also used for sonic CESCs for etch applications.The doped ceramic helps to control its resistivity in Johnson-RahbeckESC resistivity range. But the grain boundary attack on glass phases canchange the surface roughness of the ESC and therefore increase theresistivity. Further, the roughened ceramic surface will cause highhelium leak. An attack on the ceramic surface during a wafer-lessauto-clean cycle on ceramic grain boundaries often causes the impedanceof the ceramic to move from a Johnson-Rahbeck type impedance to aCoulombic type impedance.

High purity ceramic, e.g., Alumina, has been widely used as thedielectric puck layer on a surface of ESCs. It has been used either as amonopolar or a bipolar ESC. Further, it is used as a Coulombic ESC dueto its high resistivity. High purity alumina, e.g., 99.7% purity orhigher, may be applied as ESC dielectric puck layer either using a solidsintering ceramic or using a thermal spray coating.

Recently introduced CESCs, employing a sintered Aluminum nitride (AlN)dielectric, have poor thermal transfer characteristics. Resistivity ofthe ceramic material is temperature-dependent and more variable frompiece to piece than the PESC. AlN has a superior thermal conductivity incomparison with alumina. Therefore, it has received wide applications asa high temperature ESC operating at 200° C. or higher. In most cases,AlN surface has mesa surface patterns to control ESC contact area with awafer surface. The major problem of AlN is that it can generate AlF₃particles when SF₆, NF₃ and other F-based gases are used in the etchingchamber. AlF₃ is one the major particle sources in etching chambertechnology. Since AlN resistivity depends on the operating temperatureas a Johnsen-Rahbek ESC, selection of suitable types of AlN to maintaina workable resistivity and maintaining high plasma-resistance under highdensity plasma are very important.

Depending on end user requirements and installed equipment, each of thePESC or CESC will satisfactorily hold (Chuck) and release (Dechuck).Generally speaking, it doesn't matter which type of ESC will be used,the capacitance and resistivity of an ESC are the two key parameters forESC functionality.

FIG. 1 illustrates a planar view of a conventional bipolar electrostaticchuck (ESC) 100. ESC 100 has a top surface 102 and a mounting ledge 104.ESC 100 includes a first electrode 106 and a second electrode 108. Firstelectrode 106 includes an inner electrode portion 110 and an outerelectrode portion 112.

FIG. 2 illustrates a cross-sectional view of ESC 100 along line x-x. Asillustrated in FIG. 2, ESC 100 includes a rear surface, or base, 114.

Mounting holes (not shown) on mounting ledge 104 enable mounting of ESC100 onto a system.

In operation, a first voltage differential is applied across firstelectrode 106 and second electrode 108. The voltage differential createsan electric field, which is used to attract and hold a wafer forprocessing. When the processing is finished, a second voltagedifferential (dechucking voltage) is applied across first electrode 106and second electrode 108 to release the wafer.

Although briefly described above, the voltage control on a conventionalESC, whether single or multi-poled is critical. In this light, manyparameters of the ESC that may affect such voltage control arc thereforealso critical. Non-limiting parameters include resistance, capacitance,impedance and frequency phase shift. Further, the parameters may befurther analyzed for each independent portion of the ESC, as opposed toanalyzing the parameter of the chuck in its entirety. Non-limitingexamples of which include, a specific parameter measured from oneelectrode to another electrode (pole-to-pole), a specific parametermeasured from one electrode on the top surface to the base(pole-to-base).

FIG. 3 illustrates a conventional technique of measuring a parameter ofESC 100. Here, ESC 100 includes measuring terminals 312, 308 and 310,capable of permitting measurement of a characteristic of base 114, firstelectrode 106 and second electrode 108, respectively. Conventionalmeasuring device 302 includes a first terminal 304 and a second terminal306. In this example, conventional measuring device 302 may measure acharacteristic of ESC 100 between two points. As illustrated, firstterminal 304 may be either connected to measuring terminal 312 ormeasuring terminal 308, whereas second terminal 306 may be eitherconnected to measuring terminal 312 or measuring terminal 310.

In this manner, when first terminal 304 is connected to measuringterminal 308 and when second terminal 306 is connected to measuringterminal 312, a characteristic of first electrode 106 may be measuredusing a pole-to-base measurement. Similarly, when first terminal 304 isconnected to measuring terminal 308 and when second terminal 306 isconnected to measuring terminal 310, a characteristic of first electrode106 and of second electrode 108 may be measured using a pole-to-polemeasurement. Similarly, when first terminal 304 is connected tomeasuring terminal 312 and when second terminal 306 is connected tomeasuring terminal 310, a characteristic of second electrode 108 may bemeasured using a pole-to-base measurement.

In the above discussed conventional technique, when conventionalmeasuring device 302 is capable of measuring resistance, the user maymeasure any one of the resistance of first electrode 106 frompole-to-base, the resistance of second electrode 108 from pole-to-baseand the resistance of first electrode 106 and second electrode 108 frompole to pole. Similarly, when conventional measuring device 302 iscapable of measuring capacitance, the user may measure any one of thecapacitance of first electrode 106 from pole-to-base, the capacitance ofsecond electrode 108 from pole-to-base and the capacitance of firstelectrode 106 and second electrode 108 from pole to pole. Whenconventional measuring device 302 is capable of measuring inductance,the user may measure any one of the inductance of first electrode 106from pole-to-base, the inductance of second electrode 108 frompole-to-base and the inductance of first electrode 106 and secondelectrode 108 from pole to pole. When conventional measuring device 302is capable of measuring impedance, the user may measure any one of theimpedance of first electrode 106 from pole-to-base, the impedance ofsecond electrode 108 from pole-to-base and the impedance of firstelectrode 106 and second electrode 108 from pole to pole. Whenconventional measuring device 302 is capable of measuring a phase delayof the frequency of the applied voltage, the user may measure any one ofthe phase delay of first electrode 106 from pole-to-base, the phasedelay of second electrode 108 from pole-to-base and the phase delay offirst electrode 106 and second electrode 108 from pole to pole.

FIGS. 1 and 2 illustrate one type of conventional ESC, and in a verysimplistic manner. Many features of the conventional bipolar ESCdiscussed above have not been shown or described to simplify thediscussion. Further, many other types of conventional ESCs have not beenspecifically described to simplify the discussion. The important notionis that conventional techniques exist to measure specific properties ofESCs and individual portions thereof.

Reliable electrical performance is of the utmost importance.Accordingly, an ESC manufacturer may perform quality assurance checks onmanufactured ESC before shipping to customers. One conventional qualityassurance check may include determining whether a specific parameter ofa manufactured ESC is within a predetermined acceptable range,non-limiting examples of which include: the measured resistance beingequal to or greater than R₁Ω and equal to or less than R₂Ω; the measuredcapacitance being equal to or greater than c₁F and equal to or less thanc₂F; the measured impedance being equal to or greater than Z₁Ω and equalto or less than Z₂Ω; and the measured frequency phase shift being equalto or greater than φ₁ and equal to or less than φ₂. In the conventionalmethods, the manufacturer applies a current or voltage to the terminalsas discussed above at a predetermined frequency f_(m). If allsignificant characteristics, e.g., resistance as measured by anOhmmeter, are within the manufacturer's predetermined range ofacceptability, then the ESC is determined to be acceptable.

As an example in TABLE I below, resistance and capacitance measurementswere taken on several ESCs (p/n 718-094523-281-E). Capacitancemeasurements ranged from 3.478 to 3.777 nano Farads and resistancemeasurements ranged from 2.267 to 3.829 Meg Ohms:

TABLE I Device (Ser. No.) Capacitance (nF) Resistivity (Megohms) D194693.726 3.829 D17303 3.777 3.244 D18469 3.725 3.829 D17424 3.640 2.672D17697 3.478 2.267Note, these devices were deemed acceptable by the manufacturer. Howclose the first device tested was to exceeding the maximum allowableresistance, or the second was to having too little resistance hasn'tbeen defined.

An ESC's performance will degrade with use. If visual inspection clearlyindicates ESC defects (cracked, deep scratches, residual particles)immediate replacement may be in order. It is difficult to isolate thecause when an ESC fails to perform satisfactorily, because of thesensitivity and complexity of the process control system. The presentstate of the art does not provide a simple non-invasive means ofdetecting non-visual defects. Conventional characteristic tests, forexample, duplicating the manufacturer's acceptance tests, as discussedabove, may indicate that a particular ESC is acceptable even though theESC does not perform satisfactorily.

What is needed is a reliable, non-invasive method to determine thesuitability of an ESC for initial or for continued use.

BRIEF SUMMARY

It is an object of the present invention to provide a reliable,non-invasive, electrical test method for predicting satisfactoryperformance of ESCs, both for initial acceptance and for in-service use.

In accordance with an aspect of the present invention, a method is usedto test an ESC having a front surface and a back surface and comprisinga first electrode and a second electrode. The method comprisesestablishing predetermined acceptable limits of a parameter of the ESCwithin a frequency band, and measuring the parameter of the ESC withinthe frequency band.

In accordance with another aspect of the present invention, a method isused to establish acceptable limits of a parameter of an electrostaticchuck using a known upper limit of the parameter at a single frequencyand a known lower limit of the parameter at the single frequency. Themethod comprises measuring the parameter of the electrostatic chuckwithin a frequency band to obtain a function of the parameter within thefrequency band, generating a slope of the function of the parameterwithin the frequency band, generating an acceptable upper limit of theparameter using the known upper limit of the parameter at the singlefrequency and the slope of the function of the parameter, and generatingan acceptable lower limit of the parameter using the known lower limitof the parameter at the single frequency and the slope of the functionof the parameter.

In accordance with an aspect of the present invention, a method is usedto establish acceptable limits of a parameter of an electrostatic chuckusing a known upper limit of the parameter at a single frequency and aknown lower limit of the parameter at the single frequency. The methodcomprises measuring the parameter of the electrostatic chuck within afrequency band a plurality of times to obtain a corresponding pluralityof functions of the parameter within the frequency band, generating amean function of the parameter based on the plurality of functions,generating a predetermined number of standard deviations of theparameter based on the plurality of functions, generating an acceptableupper limit of the parameter and an acceptable lower limit of theparameter using the predetermined number of standard deviations of theparameter.

Additional objects, advantages and novel features of the invention areset forth in part in the description which follows, and in part willbecome apparent to those skilled in the art upon examination of thefollowing or may be learned by practice of the invention. The objectsand advantages of the invention may be realized and attained by means ofthe instrumentalities and combinations particularly pointed out in theappended claims.

BRIEF SUMMARY OF THE DRAWINGS

The accompanying drawings, which arc incorporated in and form a part ofthe specification, illustrate an exemplary embodiment of the presentinvention and, together with the description, serve to explain theprinciples of the invention. In the drawings:

FIG. 1 illustrates a planar view of a conventional bipolar ESC;

FIG. 2 is a cross-sectional view of the conventional bipolar ESC of FIG.1;

FIG. 3 illustrates a conventional technique of measuring a parameter ofESC;

FIG. 4 illustrates an exemplary technique of measuring a parameter ofESC in accordance with an aspect of the present invention;

FIG. 5 is a graph of an exemplary impedance as a function of frequencyof ESC;

FIG. 6 represents manufacturer's chosen tolerances for a measuredparameter at a manufacturer's frequency;

FIG. 7 represents an exemplary method of establishing tolerances for ameasured parameter over a frequency band in accordance with an aspect ofthe present invention;

FIG. 8 illustrates a plurality of measured impedances as a function offrequency of a corresponding plurality of ESCs;

FIG. 9 represents another exemplary method of establishing tolerancesfor a measured parameter over a frequency band in accordance with anaspect of the present invention;

FIG. 10 is the flow diagram illustrating an exemplary method of testingan ESC in accordance with an aspect of the present invention;

FIG. 11 is a graph of two measured impedance function two correspondingESCs;

FIG. 12 is the graph of FIG. 11, having established acceptable upper andlower boundaries with respect to a measured impedance functionsuperimposed thereon;

FIG. 13 is a graph having the impedance function of FIG. 5 in additionto an exemplary measured capacitance function, in accordance with anaspect of the present invention;

FIG. 14 is a graph having the impedance function of FIG. 5 in additionto an exemplary measured impedance function, in accordance with anaspect of the present invention;

FIG. 15 is a graph having the impedance function of FIG. 5 in additionto exemplary measured impedance functions as measured at differenttemperatures, in accordance with an aspect of the present invention;

FIG. 16 is a schematic representation of an ESC as a RC circuit; and

FIG. 17 is a graph showing resistance and phase shift as a function ofthe log of the frequency.

DETAILED DESCRIPTION

Aspects of the present invention will now be described with reference toFIGS. 4-15.

FIG. 4 illustrates an exemplary technique of measuring a parameter ofESC 100 in accordance with the present invention. The method of FIG. 4differs from the method of FIG. 3 in that the method of FIG. 4 includesa frequency response analyzer 402 in place of the conventional measuringdevice 302 of FIG. 3. Frequency response analyzer 402 includes a firstterminal 404 and a second terminal 406. In this example, frequencyresponse analyzer 402 may measure a characteristic of ESC 100 at twopoints. As illustrated, first terminal 404 may be either connected tomeasuring terminal 312 or measuring terminal 308, whereas secondterminal 406 may be either connected to measuring terminal 312 ormeasuring terminal 310.

In this manner, when first terminal 404 is connected to measuringterminal 308 and when second terminal 406 is connected to measuringterminal 312, a characteristic of first electrode 106 may be measuredusing a pole-to-base measurement. Similarly, when first terminal 404 isconnected to measuring terminal 308 and when second terminal 406 isconnected to measuring terminal 310, a characteristic of first electrode106 and of second electrode 108 may be measured using a pole-to-polemeasurement. Similarly, when first terminal 404 is connected tomeasuring terminal 312 and when second terminal 406 is connected tomeasuring terminal 310, a characteristic of second electrode 108 may bemeasured using a pole-to-base measurement.

As distinct from the conventional measuring device 302 of the methodillustrated in FIG. 3, in accordance with the present invention,frequency response analyzer 402 measures a characteristic over afrequency band. On other words, in the conventional methods, anyparticular characteristic—whether it be impedance, resistance,capacitance, etc., and whether it be measured from pole-to-pole,base-to-base, surface, etc.—was measured at a single frequency. Inaccordance with embodiments of the present invention, any particularcharacteristic may be measured over a frequency band. This will bedescribed in more detail below with respect to FIG. 5.

FIG. 5 is a graph of an exemplary impedance as a function of frequencyof ESC 100 as measured from measuring terminal 310 to measuring terminal312 using frequency response analyzer 402. As illustrated in the graph,frequency response analyzer 402 measures impedance within apredetermined band having a lowest frequency f_(o) and a maximumfrequency f_(f). The particular band may be determined by the user, andmay include frequencies in which ESC 100 will likely be used. Further,frequency response analyzer 402 measures impedance at points 502 withinthe band (f_(o), f_(f)) at sampling intervals. Points 502 include aninitial impedance Z_(o) at point 504 corresponding to initial frequencyf_(o), an impedance Z_(m) at point 506 corresponding to frequency f_(m),and a final impedance Z_(f) at point 508 corresponding to finalfrequency f_(f). Point 506 corresponds to the frequency f_(m) at whichthe manufacturer may have measured impedance in accordance with theconventional methods described above with reference to FIG. 3.

Points 502 may be used to fit a line 510, which may be considered theimpendence function of a “good” working ESC. Practically speaking, notall ESCs will have the same impedance function, yet may nevertheless beconsidered acceptable. There are many ways to establish acceptableboundaries for ESCs in accordance with the present invention.

In one method of establishing acceptable boundaries for a parameter ofESCs in accordance with the present invention, a manufacturer mayindicate that an ESC is considered acceptable if a measureable parameteris within an acceptable range. For example, as illustrated in FIG. 6, amanufacturer may allow a predetermined deviation ±σ about impedanceZ_(m), which of course was measured only at frequency f_(m). Inaccordance with the present invention, this manufacturer's predeterminedacceptable deviation ±σ about impedance Z_(m) may be used to generateacceptable impedance functions. One exemplary manner includes using themanufacturer's predetermined acceptable deviation ±σ about impedanceZ_(m) in conjunction with the slope of line 510. As seen in FIG. 7, line702 is generated using an impedance of Z_(m+σ) at frequency f_(m) withthe slope of line 510. Similarly, line 704 is generated using animpedance of Z_(m−σ) at frequency f_(m) with the slope of line 510. Assuch, line 702 will be the upper boundary of an acceptable impedancefunction of an ESC as measured from measuring terminal 310 to measuringterminal 312, whereas line 704 will be the lower boundary of anacceptable impedance function of an ESC as measured from measuringterminal 310 to measuring terminal 312.

In the embodiment discussed above, with respect to FIG. 5, the slope ofline 510 is linear. In other working examples, the slope may not belinear. As such, one method of obtaining the slope includes taking thederivative of the function of the measured parameter.

Another method of establishing acceptable boundaries for a parameter ofESCs in accordance with the present invention includes takingmeasurements from a plurality ESCs that are known to be acceptable. FIG.8, for example, illustrates this method. In the figure, a portion 802 ofline 510 is bounded above by plurality of lines 804 and bounded below byplurality of lines 806. Plurality of lines 804 correspond to impedancefunctions of a plurality of ESCs that are known to be acceptable yethave a somewhat higher impedance that the ESC corresponding to line 510,whereas plurality of lines 806 correspond to impedance functions of aplurality of ESCs that are known to be acceptable yet have a somewhatlower impedance that the ESC corresponding to line 510.

Line 802, plurality of lines 804 and plurality of lines 806 may then beused to generate acceptable boundaries of impedance functions via a meanimpedance function in addition to a standard deviation. For example, asillustrated in FIG. 9, upper boundary 902 and lower boundary 904 arecreated using a predetermined standard deviation of line 802, pluralityof lines 804 and plurality of lines 806. In this example, assume thatline 510 is the mean function of plurality of lines 804 and plurality oflines 806. As such, line 902 will be the upper boundary of an acceptableimpedance function of an ESC as measured from measuring terminal 310 tomeasuring terminal 312, whereas line 904 will be the lower boundary ofan acceptable impedance function of an ESC as measured from measuringterminal 310 to measuring terminal 312.

Once acceptable boundaries for a parameter of ESCs arc established, anESC, whether new or used, may be tested in accordance with an aspect ofthe present invention to determine if it remains acceptable. Anexemplary method of testing an ESC for acceptability will now bedescribed with reference to FIG. 10.

FIG. 10 is a logic flow diagram of an exemplary process of testing anESC for acceptability in accordance with the present invention. Asillustrated in the figure, process 1000 starts (S1002) and a parameteris determined to be measured (S1004). For purposes of discussion, assumethat the parameter to be measured is impedance as measured frommeasuring terminal 310 of a used ESC to measuring terminal 312 of theused ESC using frequency response analyzer 402.

Once the parameter to be measured is determined, frequency responseanalyzer 402 scans a predetermined frequency band (S1006) and measuresthe corresponding impedances. FIG. 11 shows a graph of a measuredimpedance function from a used ESC as compared to an impedance functionof ESC 100, which in this example is known to be acceptable. Asillustrated in the figure, the measured impedance function 1102 of usedESC is distinct from line 510, the measured impedance function of ESC100. Similar to FIG. 5 discussed above, frequency response analyzer 402measures impedance within a predetermined band having an initialfrequency f_(o) and a final frequency f_(f). Distinctions betweenmeasured impedance function 1102 and measured impedance function 510will now be described with reference to FIG. 12.

Similar to FIG. 7 discussed above, FIG. 12 includes establishedacceptable upper and lower boundaries with respect to a measuredimpedance function. Specifically, line 702 is the upper boundary of anacceptable impedance function of an ESC as measured from measuringterminal 310 to measuring terminal 312, whereas line 704 is the lowerboundary of an acceptable impedance function of an ESC as measured frommeasuring terminal 310 to measuring terminal 312.

In the present example, measured impedance function 1102 includes afirst portion 1202, a second portion 1204 and a third portion 1206. Bothfirst portion 1202 and third portion 1206 arc disposed within lines 702and 704 and may therefore be considered acceptable. Portion 1204 howeveris disposed below line 704 and therefore would be consideredunacceptable. Further the slope of portion 1204 is dramaticallydifferent from the slope of line 510 and therefore would be consideredunacceptable.

A portion 1208, which spans from the impedance Z_(α) as measured atfrequency f_(α) to the impedance Z_(θ) as measured at frequency f_(θ),of portion 1202 lies with lines 702 and 704, but has a dramaticallydifferent slope than that of line 510. Similarly, portion 1210, whichspans from the impedance Z_(φ) as measured at frequency f_(φ) to theimpedance Z_(φ) as measured at frequency f_(φ), of portion 1206 has adramatically different slope than that of line 510. As such, althoughthe measured impedance within portions 1208 and 1210 may be acceptable,the rate of change of impedance within the corresponding frequency bandsmay raise concern as to suitability.

Returning back to FIG. 10, once the parameter is measured, in thepresent example, the impedance function of an ESC as measured frommeasuring terminal 310 to measuring terminal 312, it is determinedwhether the ESC is acceptable (S1008). It should be noted that inaccordance with the conventional technique, if the ESC of FIG. 12 wasmeasured at the manufacturer's test frequency f_(m), then thecorresponding measured impedance Z_(t) at point 1212 on line 1102 wouldindicate that the ESC is acceptable. However, in accordance with thepresent invention, one might conclude that the ESC is unacceptable inlight of the slope of line 1102 at portions 1204, 1208 and 1210 beingsubstantially different from the slope of acceptable ESC 100 having line510. Further, one might conclude that ESC is unacceptable in light ofportion 1204 being below line 704.

Deviations in magnitude of a measured parameter or deviations in therate of change of the measured parameter over a frequency band mayindicate any one of a plurality of problems or potential problems,non-limiting examples of which include: an integrity breakdown in atleast one part of the ESC; stress, which may lead to an integritybreakdown, in at least one part of the ESC. Further, in accordance withthe present invention, a user may determine that a particular ESC thatis tested, is not acceptable within a specific frequency band but isacceptable in other frequency bands. For example, returning to FIG. 12,a user may determine that the tested ESC is acceptable from frequencyf_(o) frequency f_(α) and from frequency f_(φ) to frequency f_(f). Assuch, as opposed to discarding the tested ESC, it may be used in a morerestricted manner.

Returning to FIG. 10, if the tested ESC is determined to beunacceptable, it is discarded (S1010). If the tested ESC is determinedto be acceptable, then the user may wish to make further tests for otherparameters (S1012).

The above discussed exemplary embodiments of the present invention withreference to FIGS. 4-12 are drawn to a bipolar ESC wherein the parametermeasured is impedance as measured from measuring terminal 310 tomeasuring terminal 312. Of course other parameters may be measured.

FIG. 13 shows a graph having the impedance function of FIG. 7 inaddition to a capacitance function 1302. The capacitance of ESC 100 isdisplayed as measured from measuring terminal 310 to measuring terminal312, and as measured from initial frequency f_(o) to final frequencyf_(f). The figure additionally illustrates an acceptable upper boundary1304 for the capacitance function and an acceptable lower boundary 1306of the capacitance function. As discussed above in the previousembodiments with reference to impedance, these acceptable boundaries maybe determined in many ways.

Returning to FIG. 10, if an new parameter is to be measured (S1004), forexample capacitance as illustrated in FIG. 13, then the measuredcapacitance function is compared with the acceptable upper boundary 1304and the acceptable lower boundary 1306, in a manner similar to thatdescribed above with reference to impedance.

In other embodiments, the “other parameter” of step S1012 of FIG. 10 maybe a new measurement from different ports on the ESC. For example,another parameter may be impedance as measured from measuring terminal310 to measuring terminal 308. As such, the new measurement will be apole-to-pole impedance. FIG. 14 illustrates line 510 and a line 1402corresponding to the impedance of ESC 100 as measured from measuringterminal 310 to measuring terminal 312, and as measured from initialfrequency f_(o) to final frequency f_(f). In this example, the impedanceslope for lines 510 and 1402 are similar, yet the magnitude of theimpedance of line 1402 is slightly lower than the magnitude of theimpedance of line 510.

In other embodiments, the “other parameter” of step S1012 of FIG. 10 maybe a new measurement of the same parameter, from the same ports on theESC, but in a different ambient temperature. FIG. 15 illustrates line510, line 1502 and line 1504. Line 510 corresponds to the impedance ofESC 100 as measured from measuring terminal 310 to measuring terminal312, and as measured from initial frequency f_(o) to final frequencyf_(f), and as measured from a first temperature t_(o). Line 1502corresponds to the impedance of ESC 100 as measured from measuringterminal 310 to measuring terminal 312, and as measured from initialfrequency f_(o) to final frequency f_(f), and as measured from a secondtemperature t_(h), wherein t_(h)>t₀. Line 1504 corresponds to theimpedance of ESC 100 as measured from measuring terminal 310 tomeasuring terminal 312, and as measured from initial frequency f_(o) tofinal frequency f_(f), and as measured from a second temperature t_(l),wherein t_(o)>t_(l).

As discussed earlier, and ESC manipulates electric fields to chuck, holdand de-chuck wafers for processing. Therefore, capacitance of an ESC isa particularly important parameter to monitor and maintain. In aspecific working example, capacitance is determined by measuringimpedance via a frequency response analyzer, as will be discussed inmore detail below.

ESC 100, for example as measured from measuring terminal 310 tomeasuring terminal 312, may be schematically illustrated as a parallelRC circuit as illustrated in FIG. 16. In the figure, resistor 1602corresponds to the overall resistance between measuring terminal 310 andmeasuring terminal 312 whereas capacitor 1604 corresponds to the overallcapacitance between measuring terminal 310 and measuring terminal 312.Because resistor 1602 is in parallel with capacitor 1604 the overallimpedance Z of ESC 100, as measured from measuring terminal 310 tomeasuring terminal 312, may be derived from basic circuit theory as:

$Z = {\frac{{RX}_{c}^{2}}{R^{2} + X_{c}^{2}} - \frac{j\; R^{2}X_{c}}{R^{2} + X_{c}^{2}}}$where Xc = 1/(ω C), and

where Xc is die capacitive resistance as measured in Ohms, ω is thedriving frequency of the input signal, C is the capacitance as measuredin Farads and R is the resistance as measured in Ohms.

By using the known impedance function discussed above, and by measuringthe impedance of ESC 100, for example as measured from measuringterminal 310 to measuring terminal 312, with frequency response analyzer402, the capacitance C and resistance R of ESC 100 may be determined.

With known upper and lower limits on acceptability of capacitance andresistance, for example having previously been determined by any of theexample methods discussed above, then a measured impedance of ESC 100may be used to determine whether ESC 100 is acceptable based on itsresistance and capacitance For example, a Bode plot based on themeasured impedance will readily determine whether ESC 100 is acceptable.

FIG. 17 is an exemplary graph showing a Bode phase plot 1702 and aresistance plot 1704 on a log-frequency axis. Bode phase plot 1702illustrates how much a frequency is phase-shifted, which is calculatedbased on the imaginary and real portions of impedance discussed above.It should be noted that the Bode phase plot 1702 maintains a steadyslope between log 2 and log 4 on the graph. As such, the capacitancevaries little throughout these frequencies, which indicates that ESC 100should maintain steady chucking, holding and de-chucking operations.

The above discussed exemplary embodiment include testing of a bipolarESC. Of course any type of ESC may be tested in accordance with thepresent invention. Further, any number of measurable parameters, anynumber of measurements from different measuring ports or sites, and anynumber of temperatures for measurements of an ESC may be used todetermine acceptability in accordance with the present invention.

To tailor the method for a specific wafer production facility,accept-reject criteria may be developed for each differenttype/model/series of ESC used at that facility, based on theinstallation's equipment configuration, the test equipment selected, andapplicable proprietary processes. Before placing new ESCs in service,each ESC may be tested and its initial, benchmark, measurementsrecorded. Subsequently, each time an ESC is tested, the measurementswould be added to its record, until it fails the acceptance criteria forresistance, capacitance or any other controlled parameter, or iswithdrawn from service for other reasons, e.g. unacceptable visibledefects.

The foregoing description of various preferred embodiments of theinvention have been presented for purposes of illustration anddescription. It is not intended to be exhaustive or to limit theinvention to the precise forms disclosed, and obviously manymodifications and variations are possible in light of the aboveteaching. The exemplary embodiments, as described above, were chosen anddescribed in order to best explain the principles of the invention andits practical application to thereby enable others skilled in the art tobest utilize the invention in various embodiments and with variousmodifications as arc suited to the particular use contemplated. It isintended that the scope of the invention be defined by the claimsappended hereto.

1. A method of testing an electrostatic chuck having a front surface anda back surface and comprising at least one electrode, said methodcomprising: establishing predetermined acceptable limits of a parameterof the electrostatic chuck within a frequency band; and measuring theparameter of the electrostatic chuck within the frequency band.
 2. Themethod of claim 1, wherein said measuring a first parameter of theelectrostatic chuck comprises measuring resistance.
 3. The method ofclaim 2, wherein the at least one electrode comprises a first electrodeand a second electrode, and wherein said measuring a resistancecomprises measuring a resistance between the first electrode and thesecond electrode.
 4. The method of claim 2, wherein said measuring aresistance comprises measuring a resistance between the back surface andone of the at least one electrode.
 5. The method of claim 1, whereinsaid measuring a first parameter of the electrostatic chuck comprisesmeasuring capacitance.
 6. The method of claim 5, wherein the at leastone electrode comprises a first electrode and a second electrode, andwherein said measuring a capacitance comprises measuring a capacitancebetween the first electrode and the second electrode.
 7. The method ofclaim 5, wherein said measuring a capacitance comprises measuring acapacitance between the back surface and one of the at least oneelectrode.
 8. The method of claim 1, wherein said measuring a firstparameter of the electrostatic chuck comprises measuring impedance. 9.The method of claim 8, wherein the at least one electrode comprises afirst electrode and a second electrode, and wherein said measuring animpedance comprises measuring an impedance between the first electrodeand the second electrode.
 10. The method of claim 8, wherein saidmeasuring an impedance comprises measuring an impedance between the backsurface and one of the at least one electrode.
 11. The method of claim1, wherein said measuring the parameter of the electrostatic chuckwithin the frequency band comprises measuring the parameter of theelectrostatic chuck within the frequency band at a first temperature andmeasuring the parameter of the electrostatic chuck within the frequencyband at a second temperature.
 12. The method of claim 1, wherein saidmeasuring a first parameter of the electrostatic chuck comprisesmeasuring at least one of resistance, capacitance and impedance.
 13. Themethod of claim 12, wherein said measuring the parameter of theelectrostatic chuck within the frequency band comprises measuring theparameter of the electrostatic chuck within the frequency band at afirst temperature and measuring the parameter of the electrostatic chuckwithin the frequency band at a second temperature.
 14. A method ofestablishing acceptable limits of a parameter of an electrostatic chuckusing a known upper limit of the parameter at a single frequency and aknown lower limit of the parameter at the single frequency, said methodcomprising: measuring the parameter of the electrostatic chuck within afrequency band to obtain a function of the parameter within thefrequency band; generating a slope of die function of the parameterwithin the frequency band; generating an acceptable upper limit of theparameter using the known upper limit of the parameter at the singlefrequency and the slope of the function of the parameter, and generatingan acceptable lower limit of the parameter using the known lower limitof the parameter at the single frequency and the slope of the functionof the parameter.
 15. The method of claim 14, wherein said measuring theparameter of the electrostatic chuck within a frequency band comprisesmeasuring at least one of resistance, capacitance and impedance.
 16. Themethod of claim 14, wherein said measuring the parameter of theelectrostatic chuck within a frequency band comprises measuring theparameter of the electrostatic chuck within the frequency band at afirst temperature and measuring the parameter of the electrostatic chuckwithin the frequency band at a second temperature.
 17. A method ofestablishing acceptable limits of a parameter of an electrostatic chuckusing a known upper limit of the parameter at a single frequency and aknown lower limit of the parameter at the single frequency, said methodcomprising: measuring the parameter of the electrostatic chuck within afrequency band a plurality of times to obtain a corresponding pluralityof functions of the parameter within the frequency band; generating amean function of the parameter based on the plurality of functions;generating a predetermined number of standard deviations of theparameter based on the plurality of functions; generating an acceptableupper limit of the parameter and an acceptable lower limit of theparameter using the predetermined number of standard deviations of theparameter.
 18. The method of claim 17, wherein said measuring theparameter of the electrostatic chuck within a frequency band comprisesmeasuring at least one of resistance, capacitance and impedance.
 19. Themethod of claim 17, wherein said measuring the parameter of theelectrostatic chuck within a frequency band comprises measuring theparameter of the electrostatic chuck within the frequency band at afirst temperature and measuring the parameter of the electrostatic chuckwithin the frequency band at a second temperature.